Aerotech Piezo nanopositioners
The QNP-Z series piezo nanopositioning stages offer resolution to 0.15 nm, linearity to 0.007% and repeatability to 1 nm. With high dynamics (resonant frequency and stiffness), users can achieve high throughput in exacting processes. A variety of travels (100 to 600 μm), feedback options and vacuum versions are available. The stages are guided by precision flexures that are optimized using finite element analysis. The resulting design offers stiffness and resonant frequency up to 1,050 Hz. All stages offer optional closed-loop feedback using a capacitive sensor design for sub-nanometer resolution and high linearity.