Aerotech XYZ piezo stages for 3-D positioning accuracy
QNP3 series XYZ piezo positioning stages combine sub-nanometer resolution, high dynamics and geometric performance in a compact three-degree-of-freedom (DoF) package. They come with a 40- x 40-mm clear aperture with closed-loop travels up to 100 x 100 x 10 µm (open loop travels to 120 x 120 x 12 µm). The design is suitable for optical and scanning probe microscopy or other inspection or manufacturing applications in which two-sided part access is required with three-DoF manipulation. The piezo stages use an FEA-optimized precision parallel-kinematic flexure and metrology design to ensure multi-axis accuracy, high stiffness and long device life.