Heidenhain Angle encoder for vacuum environments

May 22, 2017
The ECA 4000 ring encoder has been updated so it can survive and provide angular motion feedback within various machine types using a vacuum environment

The ECA 4000 ring encoder has been updated so it can survive and provide angular motion feedback within various machine types using a vacuum environment. Able to handle a vacuum environment down to 10-7 mbar, the ECA 4000V encoder series has been updated to accommodate high resolution and accuracy inside the vacuum chamber. With several types of sizes, resolutions, accuracies and electrical interfaces, the encoder is suited for applications in semiconductor, flat panel, and instrumentation markets. The scanning units have vents to allow air to escape as well as a tin-plated copper outer shield for cabling, with a 15-pin vacuum-rated connector to plug into the firewall feedthrough.