The ECO-LM series direct-drive linear motor stages are optimized with high-precision, noncontact linear encoders. The precision noncontact encoders enable minimal incremental motion to 10 nm with micrometer-level repeatability. The optional HALAR factory calibration improves positioning accuracy to ±1.5 µm. The ironless forcer coil provides high force with zero cogging for smooth velocity and position control. The ECO-SL series includes several NEMA 23 stepper motor and brushless servo motor options. It is designed for adaptability to specific applications. Several encoder options provide electrical resolutions ranging from 0.5 µm down to sub-nm. A holding brake can be added for vertical applications.
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