These high-resolution and high repeatability AU200-100x100 XY alignment stages are supplied with a standard 4-mm-per-turn ground lead screw or an optional 1-mm-per-turn ground lead screw. The stages are capable of 1-micron resolution and 2-micron repeatability. Preloaded V-groove and crossed roller bearings contribute to the stages’ high precision and stiffness. The footprint of these low-profile (80-mm) tables is 348 mm x 348 mm, and they feature a 188-mm x 188-mm open aperture. A precise pattern of threaded holes allows for the mounting of tooling and fixtures or an optional solid top plate. They can be integrated into new or existing systems.
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